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Schematic representation of the process responsible for metal oxide
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A–c) ternary metal oxide phase diagram of peald igzo with respect toSchematic representation of formation of mixed-metal oxide 3 Oxide baur representingThe steel phase diagram..
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Joint phase diagram of copper oxides. from armitage et al. [3]. solid
A schematic diagram of two mechanisms controlling the growth of theA) peald process for in2o3, ga2o3, and zno using dadi, tmga, and dez .
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a) PEALD process for In2O3, Ga2O3, and ZnO using DADI, TMGa, and DEZ
Schematic representation of formation of mixed-metal oxide 3
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a) X‐ray diffraction (XRD) patterns of the PEALD IGZO regarding
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